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airSEM™: high resolution STEM detection in open air


This study focuses on the characterization of STEM performance in airSEM™, in particular measuring the scattering angle of transmitted electron in air. Transmission through a dual thickness SiN membrane was measured for different distances separating the scattering membrane and the detector. The data shows that mass thickness contrast is preserved despite the scattering of electrons by the air molecules.

Having STEM detection capability in open air addresses several challenges associated with vacuum STEM:

  1. Imaging samples which are not vacuum compatible in particular hydrated samples.
  2. Cross correlating data from different modalities which are commonly situated on different platforms.

In addition operating in air simplifies operation and significantly reduces the time for data acquisition.






Link to papr:

High resolution STEM detection in open air – IMC 2014

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